Electrical characteristics of carbon nitride capacitor for micro-humidity sensors
نویسندگان
چکیده
منابع مشابه
Synthesis and Characterization of Carbon Nitride Films for Micro Humidity Sensors
Nano-structured carbon nitride (CNx) films were synthesized by a reactive RFmagnetron sputtering system with a DC bias under various deposition conditions, and theirphysical and electrical properties were investigated with a view to using them for microhumidity sensors. The FTIR spectra of the deposited films showed a C=N stretching bandin the range of 1600~1700 ㎝⁻1, depending on the amount of ...
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Nanocomposites films of (polymer blend-ceramics) were prepared from (PVA-PAA) blend and (PVA-PAA) blend doped with niobium carbide nanoparticles for humidity sensors have low cost, easy fabrication, high sensitivity, lightweight and high corrosion resistance. The structural, electrical and optical properties of (PVA-PAA-NbC) nanocomposites have been studied. The D.C electrical properties of (PV...
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ژورنال
عنوان ژورنال: Journal of Sensor Science and Technology
سال: 2007
ISSN: 1225-5475
DOI: 10.5369/jsst.2007.16.2.097